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모션 스테이지

LM가이드 스테이지

Multi-Mover Dual Gantry Stage
  
설명
- Stroke : 2,100mm×2,100mm
- In-position stability : ±0.05㎛
- Repeatability :±1㎛
사양
Axis
X₁~ X₄
Y₁~ Y12
Storke
2,100mm
2,100mm
Guide
LM Bearing
Load mass
40kg(Head)
Speed
500mm/sec
Acceleration
1m/sec²
Position accuracy(After calibration)
10㎛
Repeatability
±1㎛
Option
Application field
LCD height measuring equipment etc..